- Variable Pressure Specimen Chamber
- Low Vacuum BSE Mode for Sample Charging Mitigation
- Chamber Pressure to 4Torr in 25 Millitorr Steps
- Hi Vacuum SE Mode for Standard High Resolution SEM Imaging
- Electron Gun: LaB6 Ion Pumped - and Tungsten
- Accelerating Voltage: 100volts to 30kV
- High Vacuum Image Resolution: 4nm @ 30kV
- Low Vacuum Image Resolution: 6nm @ 30kV
- Magnification: x10 – x400,000 Secondary Electron Image
| - Probe Current: 1pA to 5nA Range
- TURBO Pumped Specimen Chamber
- Robinson BSE Detector
- 3 Axis Motorized Stage
- X/Y = 125mm
- Z = 100mm
- ROTATION = 360 Degrees Continuous
- TILT = -5 to +90 Degrees
- PC Controlled Stage Automation and SEM Control Backscatter Detector
- Energy Dispersive Spectrometer with state of the art Silicon Drift Detector
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